Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-17-010878-index-headers.html | 2017-02-22 17:01:49 | |
| 0001104659-17-010878-index.html | 2017-02-22 17:01:49 | |
| 0001104659-17-010878.txt | 2017-02-22 17:01:49 | |
 0001104659-17-010878-xbrl.zip | 277243 | 2017-02-22 17:01:49 |
| a17-1151_110k.htm | 2780455 | 2017-02-22 17:01:49 |
| a17-1151_1ex21d1.htm | 43952 | 2017-02-22 17:01:49 |
| a17-1151_1ex23d1.htm | 15440 | 2017-02-22 17:01:49 |
| a17-1151_1ex23d2.htm | 7312 | 2017-02-22 17:01:49 |
| a17-1151_1ex31d1.htm | 11743 | 2017-02-22 17:01:49 |
| a17-1151_1ex31d2.htm | 12178 | 2017-02-22 17:01:49 |
| a17-1151_1ex32d1.htm | 6307 | 2017-02-22 17:01:49 |
| a17-1151_1ex32d2.htm | 6792 | 2017-02-22 17:01:49 |
| FilingSummary.xml | 56775 | 2017-02-22 17:01:49 |
| Financial_Report.xlsx | 123308 | 2017-02-22 17:01:49 |
 g11511boi001.gif | 15697 | 2017-02-22 17:01:49 |
| R1.htm | 28217 | 2017-02-22 17:01:49 |
| R10.htm | 91825 | 2017-02-22 17:01:49 |
| R11.htm | 111784 | 2017-02-22 17:01:49 |
| R12.htm | 77540 | 2017-02-22 17:01:49 |
| R13.htm | 118086 | 2017-02-22 17:01:49 |
| R14.htm | 21629 | 2017-02-22 17:01:49 |
| R15.htm | 38129 | 2017-02-22 17:01:49 |
| R16.htm | 40912 | 2017-02-22 17:01:49 |
| R17.htm | 55756 | 2017-02-22 17:01:49 |
| R18.htm | 85084 | 2017-02-22 17:01:49 |
| R19.htm | 21648 | 2017-02-22 17:01:49 |
| R2.htm | 84055 | 2017-02-22 17:01:49 |
| R20.htm | 39955 | 2017-02-22 17:01:49 |
| R21.htm | 110348 | 2017-02-22 17:01:49 |
| R22.htm | 292453 | 2017-02-22 17:01:49 |
| R23.htm | 7873 | 2017-02-22 17:01:49 |
| R24.htm | 229307 | 2017-02-22 17:01:49 |
| R25.htm | 104349 | 2017-02-22 17:01:49 |
| R26.htm | 37543 | 2017-02-22 17:01:49 |
| R27.htm | 9690 | 2017-02-22 17:01:49 |
| R28.htm | 99333 | 2017-02-22 17:01:49 |
| R29.htm | 108607 | 2017-02-22 17:01:49 |
| R3.htm | 21274 | 2017-02-22 17:01:49 |
| R30.htm | 54044 | 2017-02-22 17:01:49 |
| R31.htm | 86296 | 2017-02-22 17:01:49 |
| R32.htm | 112275 | 2017-02-22 17:01:49 |
| R33.htm | 84346 | 2017-02-22 17:01:49 |
| R34.htm | 121369 | 2017-02-22 17:01:49 |
| R35.htm | 23752 | 2017-02-22 17:01:49 |
| R36.htm | 34963 | 2017-02-22 17:01:49 |
| R37.htm | 41383 | 2017-02-22 17:01:49 |
| R38.htm | 54097 | 2017-02-22 17:01:49 |
| R39.htm | 84689 | 2017-02-22 17:01:49 |
| R4.htm | 57363 | 2017-02-22 17:01:49 |
| R40.htm | 20950 | 2017-02-22 17:01:49 |
| R41.htm | 35042 | 2017-02-22 17:01:49 |
| R42.htm | 102658 | 2017-02-22 17:01:49 |
| R43.htm | 319884 | 2017-02-22 17:01:49 |
| R44.htm | 242855 | 2017-02-22 17:01:49 |
| R45.htm | 106093 | 2017-02-22 17:01:49 |
| R46.htm | 37645 | 2017-02-22 17:01:49 |
| R47.htm | 7146 | 2017-02-22 17:01:49 |
| R48.htm | 26134 | 2017-02-22 17:01:49 |
| R49.htm | 20832 | 2017-02-22 17:01:49 |
| R5.htm | 40882 | 2017-02-22 17:01:49 |
| R50.htm | 20698 | 2017-02-22 17:01:49 |
| R51.htm | 14138 | 2017-02-22 17:01:49 |
| R52.htm | 40461 | 2017-02-22 17:01:49 |
| R53.htm | 42189 | 2017-02-22 17:01:49 |
| R54.htm | 8650 | 2017-02-22 17:01:49 |
| R55.htm | 98637 | 2017-02-22 17:01:49 |
| R56.htm | 12705 | 2017-02-22 17:01:49 |
| R57.htm | 18459 | 2017-02-22 17:01:49 |
| R58.htm | 42478 | 2017-02-22 17:01:49 |
| R59.htm | 12042 | 2017-02-22 17:01:49 |
| R6.htm | 53849 | 2017-02-22 17:01:49 |
| R60.htm | 35070 | 2017-02-22 17:01:49 |
| R61.htm | 31102 | 2017-02-22 17:01:49 |
| R62.htm | 25495 | 2017-02-22 17:01:49 |
| R63.htm | 36488 | 2017-02-22 17:01:49 |
| R64.htm | 17978 | 2017-02-22 17:01:49 |
| R65.htm | 15478 | 2017-02-22 17:01:49 |
| R66.htm | 24316 | 2017-02-22 17:01:49 |
| R67.htm | 28946 | 2017-02-22 17:01:49 |
| R68.htm | 10608 | 2017-02-22 17:01:49 |
| R69.htm | 6347 | 2017-02-22 17:01:49 |
| R7.htm | 96280 | 2017-02-22 17:01:49 |
| R70.htm | 6380 | 2017-02-22 17:01:49 |
| R71.htm | 38921 | 2017-02-22 17:01:49 |
| R72.htm | 10686 | 2017-02-22 17:01:49 |
| R73.htm | 39393 | 2017-02-22 17:01:49 |
| R74.htm | 6586 | 2017-02-22 17:01:49 |
| R75.htm | 9813 | 2017-02-22 17:01:49 |
| R76.htm | 54959 | 2017-02-22 17:01:49 |
| R77.htm | 12053 | 2017-02-22 17:01:49 |
| R78.htm | 45702 | 2017-02-22 17:01:49 |
| R79.htm | 24715 | 2017-02-22 17:01:49 |
| R8.htm | 59418 | 2017-02-22 17:01:49 |
| R80.htm | 79631 | 2017-02-22 17:01:49 |
| R81.htm | 7196 | 2017-02-22 17:01:49 |
| R82.htm | 34757 | 2017-02-22 17:01:49 |
| R83.htm | 14105 | 2017-02-22 17:01:49 |
| R84.htm | 12569 | 2017-02-22 17:01:49 |
| R85.htm | 9543 | 2017-02-22 17:01:49 |
| R86.htm | 29147 | 2017-02-22 17:01:49 |
| R87.htm | 37578 | 2017-02-22 17:01:49 |
| R88.htm | 42929 | 2017-02-22 17:01:49 |
| R89.htm | 22206 | 2017-02-22 17:01:49 |
| R9.htm | 54532 | 2017-02-22 17:01:49 |
| R90.htm | 20414 | 2017-02-22 17:01:49 |
| R91.htm | 42567 | 2017-02-22 17:01:49 |
| R92.htm | 17692 | 2017-02-22 17:01:49 |
| R93.htm | 7598 | 2017-02-22 17:01:49 |
| R94.htm | 37073 | 2017-02-22 17:01:49 |
| R95.htm | 19518 | 2017-02-22 17:01:49 |
| report.css | 2768 | 2017-02-22 17:01:49 |
| Show.js | 1411 | 2017-02-22 17:01:49 |
| veco-20161231.xml | 3949220 | 2017-02-22 17:01:49 |
| veco-20161231.xsd | 81450 | 2017-02-22 17:01:49 |
| veco-20161231_cal.xml | 114587 | 2017-02-22 17:01:49 |
| veco-20161231_def.xml | 327355 | 2017-02-22 17:01:49 |
| veco-20161231_lab.xml | 892246 | 2017-02-22 17:01:49 |
| veco-20161231_pre.xml | 646657 | 2017-02-22 17:01:49 |