Subsequent Events (Details)		1 Months Ended	12 Months Ended
	Feb. 01, 2017 $ / shares	Jan. 31, 2017 USD ($) $ / shares	Dec. 31, 2016 USD ($)	Feb. 02, 2017 $ / shares shares
Ultratech, Inc. | Implied Value Per Agreement
Business Combinations
Total transaction value			$ 815,000,000
Value of net assets acquired, net of cash balances			$ 550,000,000
Subsequent event | Ultratech, Inc.
Business Combinations
Cash to be received by acquiree (in dollars per share) | $ / shares				$ 21.75
Number of shares to be received by acquiree | shares				0.2675
Transaction consideration (in dollars per share) | $ / shares	$ 28.64
Subsequent event | 2.70 Convertible Senior Notes due 2023 | Convertible debt
Convertible Note
Aggregate principal amount		$ 345,000,000
Interest rate (as a percent)		2.70%
Net proceeds from the offering		$ 336,000,000
Discount rate (as a percent)		7.00%
Conversion ratio		24.9800
Common stock per principal amount		$ 1,000
Conversion price per share | $ / shares		$ 40.03