Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001558370-22-001461-index-headers.html | 2022-02-18 16:58:44 | |
| 0001558370-22-001461-index.html | 2022-02-18 16:58:44 | |
| 0001558370-22-001461.txt | 2022-02-18 16:58:44 | |
 0001558370-22-001461-xbrl.zip | 451864 | 2022-02-18 16:58:44 |
| FilingSummary.xml | 63862 | 2022-02-18 16:58:44 |
| Financial_Report.xlsx | 151650 | 2022-02-18 16:58:44 |
| MetaLinks.json | 1051136 | 2022-02-18 16:58:44 |
| R1.htm | 66774 | 2022-02-18 16:58:44 |
| R10.htm | 95575 | 2022-02-18 16:58:44 |
| R100.htm | 46311 | 2022-02-18 16:58:44 |
| R101.htm | 12872 | 2022-02-18 16:58:44 |
| R102.htm | 13886 | 2022-02-18 16:58:44 |
| R103.htm | 18296 | 2022-02-18 16:58:44 |
| R104.htm | 21369 | 2022-02-18 16:58:44 |
| R105.htm | 23789 | 2022-02-18 16:58:44 |
| R106.htm | 16511 | 2022-02-18 16:58:44 |
| R11.htm | 102280 | 2022-02-18 16:58:44 |
| R12.htm | 17892 | 2022-02-18 16:58:44 |
| R13.htm | 32110 | 2022-02-18 16:58:44 |
| R14.htm | 78148 | 2022-02-18 16:58:44 |
| R15.htm | 36609 | 2022-02-18 16:58:44 |
| R16.htm | 84287 | 2022-02-18 16:58:44 |
| R17.htm | 106710 | 2022-02-18 16:58:44 |
| R18.htm | 6740 | 2022-02-18 16:58:44 |
| R19.htm | 43183 | 2022-02-18 16:58:44 |
| R2.htm | 114860 | 2022-02-18 16:58:44 |
| R20.htm | 187586 | 2022-02-18 16:58:44 |
| R21.htm | 9915 | 2022-02-18 16:58:44 |
| R22.htm | 19039 | 2022-02-18 16:58:44 |
| R23.htm | 158775 | 2022-02-18 16:58:44 |
| R24.htm | 77089 | 2022-02-18 16:58:44 |
| R25.htm | 83791 | 2022-02-18 16:58:44 |
| R26.htm | 94273 | 2022-02-18 16:58:44 |
| R27.htm | 48671 | 2022-02-18 16:58:44 |
| R28.htm | 89624 | 2022-02-18 16:58:44 |
| R29.htm | 101201 | 2022-02-18 16:58:44 |
| R3.htm | 19579 | 2022-02-18 16:58:44 |
| R30.htm | 18235 | 2022-02-18 16:58:44 |
| R31.htm | 30522 | 2022-02-18 16:58:44 |
| R32.htm | 78833 | 2022-02-18 16:58:44 |
| R33.htm | 33036 | 2022-02-18 16:58:44 |
| R34.htm | 73494 | 2022-02-18 16:58:44 |
| R35.htm | 73448 | 2022-02-18 16:58:44 |
| R36.htm | 35641 | 2022-02-18 16:58:44 |
| R37.htm | 186238 | 2022-02-18 16:58:44 |
| R38.htm | 19271 | 2022-02-18 16:58:44 |
| R39.htm | 160425 | 2022-02-18 16:58:44 |
| R4.htm | 88907 | 2022-02-18 16:58:44 |
| R40.htm | 73989 | 2022-02-18 16:58:44 |
| R41.htm | 7441 | 2022-02-18 16:58:44 |
| R42.htm | 4875 | 2022-02-18 16:58:44 |
| R43.htm | 4087 | 2022-02-18 16:58:44 |
| R44.htm | 4711 | 2022-02-18 16:58:44 |
| R45.htm | 4428 | 2022-02-18 16:58:44 |
| R46.htm | 8622 | 2022-02-18 16:58:44 |
| R47.htm | 6555 | 2022-02-18 16:58:44 |
| R48.htm | 4360 | 2022-02-18 16:58:44 |
| R49.htm | 15500 | 2022-02-18 16:58:44 |
| R5.htm | 40832 | 2022-02-18 16:58:44 |
| R50.htm | 29087 | 2022-02-18 16:58:44 |
| R51.htm | 38033 | 2022-02-18 16:58:44 |
| R52.htm | 11518 | 2022-02-18 16:58:44 |
| R53.htm | 38897 | 2022-02-18 16:58:44 |
| R54.htm | 55520 | 2022-02-18 16:58:44 |
| R55.htm | 18348 | 2022-02-18 16:58:44 |
| R56.htm | 12033 | 2022-02-18 16:58:44 |
| R57.htm | 35156 | 2022-02-18 16:58:44 |
| R58.htm | 12402 | 2022-02-18 16:58:44 |
| R59.htm | 28763 | 2022-02-18 16:58:44 |
| R6.htm | 55922 | 2022-02-18 16:58:44 |
| R60.htm | 17463 | 2022-02-18 16:58:44 |
| R61.htm | 25646 | 2022-02-18 16:58:44 |
| R62.htm | 13584 | 2022-02-18 16:58:44 |
| R63.htm | 9339 | 2022-02-18 16:58:44 |
| R64.htm | 14147 | 2022-02-18 16:58:44 |
| R65.htm | 23028 | 2022-02-18 16:58:44 |
| R66.htm | 11733 | 2022-02-18 16:58:44 |
| R67.htm | 8461 | 2022-02-18 16:58:44 |
| R68.htm | 29653 | 2022-02-18 16:58:44 |
| R69.htm | 13293 | 2022-02-18 16:58:44 |
| R7.htm | 108200 | 2022-02-18 16:58:44 |
| R70.htm | 9405 | 2022-02-18 16:58:44 |
| R71.htm | 24746 | 2022-02-18 16:58:44 |
| R72.htm | 10051 | 2022-02-18 16:58:44 |
| R73.htm | 9533 | 2022-02-18 16:58:44 |
| R74.htm | 4452 | 2022-02-18 16:58:44 |
| R75.htm | 9736 | 2022-02-18 16:58:44 |
| R76.htm | 41289 | 2022-02-18 16:58:44 |
| R77.htm | 52819 | 2022-02-18 16:58:44 |
| R78.htm | 23454 | 2022-02-18 16:58:44 |
| R79.htm | 27038 | 2022-02-18 16:58:44 |
| R8.htm | 51993 | 2022-02-18 16:58:44 |
| R80.htm | 33819 | 2022-02-18 16:58:44 |
| R81.htm | 19994 | 2022-02-18 16:58:44 |
| R82.htm | 7192 | 2022-02-18 16:58:44 |
| R83.htm | 6797 | 2022-02-18 16:58:44 |
| R84.htm | 47023 | 2022-02-18 16:58:44 |
| R85.htm | 9404 | 2022-02-18 16:58:44 |
| R86.htm | 7561 | 2022-02-18 16:58:44 |
| R87.htm | 14204 | 2022-02-18 16:58:44 |
| R88.htm | 14287 | 2022-02-18 16:58:44 |
| R89.htm | 19962 | 2022-02-18 16:58:44 |
| R9.htm | 51429 | 2022-02-18 16:58:44 |
| R90.htm | 36381 | 2022-02-18 16:58:44 |
| R91.htm | 6852 | 2022-02-18 16:58:44 |
| R92.htm | 38653 | 2022-02-18 16:58:44 |
| R93.htm | 15444 | 2022-02-18 16:58:44 |
| R94.htm | 22617 | 2022-02-18 16:58:44 |
| R95.htm | 12055 | 2022-02-18 16:58:44 |
| R96.htm | 42983 | 2022-02-18 16:58:44 |
| R97.htm | 12734 | 2022-02-18 16:58:44 |
| R98.htm | 27500 | 2022-02-18 16:58:44 |
| R99.htm | 28167 | 2022-02-18 16:58:44 |
| report.css | 2768 | 2022-02-18 16:58:44 |
| Show.js | 1086 | 2022-02-18 16:58:44 |
| veco-20211231.xsd | 82535 | 2022-02-18 16:58:44 |
| veco-20211231x10k.htm | 3333623 | 2022-02-18 16:58:44 |
 veco-20211231x10k004.jpg | 46713 | 2022-02-18 16:58:44 |
 veco-20211231x10k005.jpg | 12013 | 2022-02-18 16:58:44 |
| veco-20211231x10k_htm.xml | 3030346 | 2022-02-18 16:58:44 |
| veco-20211231xex21d1.htm | 25367 | 2022-02-18 16:58:44 |
| veco-20211231xex23d1.htm | 14476 | 2022-02-18 16:58:44 |
| veco-20211231xex31d1.htm | 16232 | 2022-02-18 16:58:44 |
| veco-20211231xex31d2.htm | 16163 | 2022-02-18 16:58:44 |
| veco-20211231xex32d1.htm | 7893 | 2022-02-18 16:58:44 |
| veco-20211231xex32d2.htm | 7905 | 2022-02-18 16:58:44 |
| veco-20211231_cal.xml | 109930 | 2022-02-18 16:58:44 |
| veco-20211231_def.xml | 324463 | 2022-02-18 16:58:44 |
| veco-20211231_lab.xml | 824963 | 2022-02-18 16:58:44 |
| veco-20211231_pre.xml | 633274 | 2022-02-18 16:58:44 |