Stock Plans - Recognized Share-based Compensation (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Recognized share-based compensation
Total share-based compensation expense	$ 15,249	$ 12,703	$ 15,270
Cost of sales
Recognized share-based compensation
Total share-based compensation expense	2,373	1,870	1,903
Research and development
Recognized share-based compensation
Total share-based compensation expense	3,850	2,900	3,340
Selling, general and administrative
Recognized share-based compensation
Total share-based compensation expense	$ 9,026	$ 7,933	9,630
Restructuring
Recognized share-based compensation
Total share-based compensation expense			$ 397