Commitments and Contingencies - Legal Proceedings (Details) $ in Millions		1 Months Ended
Aug. 08, 2018 case	Oct. 31, 2021 USD ($)
Ultratech acquisition litigation
Legal Proceedings
Number of purported class action complaints filed \| case	2
Wolther Action
Legal Proceedings
Settlement amount \| $		$ 15.0

The total number of new claims filed pertaining to a loss contingency during the period.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349

Name:	us-gaap_LossContingencyNewClaimsFiledNumber
Namespace Prefix:	us-gaap_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration