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| 0001558370-23-001744-index.html | 2023-02-22 16:04:08 | |
| 0001558370-23-001744.txt | 2023-02-22 16:04:08 | |
 0001558370-23-001744-xbrl.zip | 470681 | 2023-02-22 16:04:08 |
| FilingSummary.xml | 64646 | 2023-02-22 16:04:08 |
| Financial_Report.xlsx | 163404 | 2023-02-22 16:04:08 |
| MetaLinks.json | 1146482 | 2023-02-22 16:04:08 |
| R1.htm | 66018 | 2023-02-22 16:04:08 |
| R10.htm | 95584 | 2023-02-22 16:04:08 |
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| R8.htm | 82495 | 2023-02-22 16:04:08 |
| R80.htm | 34609 | 2023-02-22 16:04:08 |
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| R99.htm | 50846 | 2023-02-22 16:04:08 |
| report.css | 2768 | 2023-02-22 16:04:08 |
| Show.js | 1086 | 2023-02-22 16:04:08 |
| veco-20221231.xsd | 84319 | 2023-02-22 16:04:08 |
| veco-20221231x10k.htm | 3338169 | 2023-02-22 16:04:08 |
 veco-20221231x10k004.jpg | 75676 | 2023-02-22 16:04:08 |
| veco-20221231x10k_htm.xml | 3192649 | 2023-02-22 16:04:08 |
| veco-20221231xex21d1.htm | 25287 | 2023-02-22 16:04:08 |
| veco-20221231xex23d1.htm | 15394 | 2023-02-22 16:04:08 |
| veco-20221231xex31d1.htm | 16232 | 2023-02-22 16:04:08 |
| veco-20221231xex31d2.htm | 16163 | 2023-02-22 16:04:08 |
| veco-20221231xex32d1.htm | 7893 | 2023-02-22 16:04:08 |
| veco-20221231xex32d2.htm | 7905 | 2023-02-22 16:04:08 |
| veco-20221231_cal.xml | 104647 | 2023-02-22 16:04:08 |
| veco-20221231_def.xml | 311453 | 2023-02-22 16:04:08 |
| veco-20221231_lab.xml | 816826 | 2023-02-22 16:04:08 |
| veco-20221231_pre.xml | 620821 | 2023-02-22 16:04:08 |