The total number of new claims filed pertaining to a loss contingency during the period.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (a)
-URI https://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 9
-Subparagraph (a)
-URI https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349

Name:	us-gaap_LossContingencyNewClaimsFiledNumber
Namespace Prefix:	us-gaap_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

Commitments and Contingencies - Legal Proceedings (Details) $ in Millions	1 Months Ended
	Nov. 30, 2022 USD ($)	Oct. 31, 2021 USD ($)	Aug. 31, 2018 case
Ultratech acquisition litigation
Legal Proceedings
Number of purported class action complaints filed \| case			2
Wolther Action
Legal Proceedings
Settlement amount		$ 15.0
Derivative Action
Legal Proceedings
Settlement amount	$ 0.3