Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001558370-21-010004-index-headers.html | 2021-08-03 16:33:37 | |
| 0001558370-21-010004-index.html | 2021-08-03 16:33:37 | |
| 0001558370-21-010004.txt | 2021-08-03 16:33:37 | |
 0001558370-21-010004-xbrl.zip | 239986 | 2021-08-03 16:33:37 |
| FilingSummary.xml | 35610 | 2021-08-03 16:33:37 |
| Financial_Report.xlsx | 88562 | 2021-08-03 16:33:37 |
| MetaLinks.json | 660087 | 2021-08-03 16:33:37 |
| R1.htm | 52204 | 2021-08-03 16:33:37 |
| R10.htm | 135444 | 2021-08-03 16:33:37 |
| R11.htm | 30331 | 2021-08-03 16:33:37 |
| R12.htm | 6382 | 2021-08-03 16:33:37 |
| R13.htm | 182787 | 2021-08-03 16:33:37 |
| R14.htm | 58657 | 2021-08-03 16:33:37 |
| R15.htm | 27387 | 2021-08-03 16:33:37 |
| R16.htm | 70074 | 2021-08-03 16:33:37 |
| R17.htm | 35882 | 2021-08-03 16:33:37 |
| R18.htm | 58812 | 2021-08-03 16:33:37 |
| R19.htm | 273773 | 2021-08-03 16:33:37 |
| R2.htm | 96027 | 2021-08-03 16:33:37 |
| R20.htm | 115565 | 2021-08-03 16:33:37 |
| R21.htm | 23014 | 2021-08-03 16:33:37 |
| R22.htm | 183083 | 2021-08-03 16:33:37 |
| R23.htm | 62096 | 2021-08-03 16:33:37 |
| R24.htm | 21114 | 2021-08-03 16:33:37 |
| R25.htm | 119164 | 2021-08-03 16:33:37 |
| R26.htm | 4192 | 2021-08-03 16:33:37 |
| R27.htm | 4851 | 2021-08-03 16:33:37 |
| R28.htm | 10763 | 2021-08-03 16:33:37 |
| R29.htm | 37097 | 2021-08-03 16:33:37 |
| R3.htm | 18969 | 2021-08-03 16:33:37 |
| R30.htm | 12020 | 2021-08-03 16:33:37 |
| R31.htm | 48443 | 2021-08-03 16:33:37 |
| R32.htm | 69100 | 2021-08-03 16:33:37 |
| R33.htm | 4959 | 2021-08-03 16:33:37 |
| R34.htm | 11771 | 2021-08-03 16:33:37 |
| R35.htm | 6802 | 2021-08-03 16:33:37 |
| R36.htm | 23611 | 2021-08-03 16:33:37 |
| R37.htm | 25035 | 2021-08-03 16:33:37 |
| R38.htm | 21627 | 2021-08-03 16:33:37 |
| R39.htm | 12687 | 2021-08-03 16:33:37 |
| R4.htm | 82120 | 2021-08-03 16:33:37 |
| R40.htm | 12940 | 2021-08-03 16:33:37 |
| R41.htm | 11736 | 2021-08-03 16:33:37 |
| R42.htm | 12267 | 2021-08-03 16:33:37 |
| R43.htm | 29783 | 2021-08-03 16:33:37 |
| R44.htm | 53261 | 2021-08-03 16:33:37 |
| R45.htm | 19783 | 2021-08-03 16:33:37 |
| R46.htm | 25333 | 2021-08-03 16:33:37 |
| R47.htm | 22383 | 2021-08-03 16:33:37 |
| R48.htm | 8453 | 2021-08-03 16:33:37 |
| R49.htm | 27175 | 2021-08-03 16:33:37 |
| R5.htm | 25722 | 2021-08-03 16:33:37 |
| R50.htm | 9723 | 2021-08-03 16:33:37 |
| R51.htm | 9735 | 2021-08-03 16:33:37 |
| R52.htm | 5915 | 2021-08-03 16:33:37 |
| R53.htm | 53935 | 2021-08-03 16:33:37 |
| R54.htm | 20665 | 2021-08-03 16:33:37 |
| R55.htm | 21269 | 2021-08-03 16:33:37 |
| R56.htm | 15103 | 2021-08-03 16:33:37 |
| R57.htm | 28649 | 2021-08-03 16:33:37 |
| R58.htm | 16376 | 2021-08-03 16:33:37 |
| R59.htm | 34964 | 2021-08-03 16:33:37 |
| R6.htm | 95291 | 2021-08-03 16:33:37 |
| R7.htm | 21570 | 2021-08-03 16:33:37 |
| R8.htm | 61222 | 2021-08-03 16:33:37 |
| R9.htm | 274452 | 2021-08-03 16:33:37 |
| report.css | 2767 | 2021-08-03 16:33:37 |
| Show.js | 1085 | 2021-08-03 16:33:37 |
| veco-20210630.xsd | 51634 | 2021-08-03 16:33:37 |
| veco-20210630x10q.htm | 2217793 | 2021-08-03 16:33:37 |
| veco-20210630x10q_htm.xml | 2266051 | 2021-08-03 16:33:37 |
| veco-20210630xex31d1.htm | 16971 | 2021-08-03 16:33:37 |
| veco-20210630xex31d2.htm | 13146 | 2021-08-03 16:33:37 |
| veco-20210630xex32d1.htm | 8885 | 2021-08-03 16:33:37 |
| veco-20210630xex32d2.htm | 8822 | 2021-08-03 16:33:37 |
| veco-20210630_cal.xml | 76607 | 2021-08-03 16:33:37 |
| veco-20210630_def.xml | 171275 | 2021-08-03 16:33:37 |
| veco-20210630_lab.xml | 533573 | 2021-08-03 16:33:37 |
| veco-20210630_pre.xml | 372501 | 2021-08-03 16:33:37 |