Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001102934-20-000028-index-headers.html | 2020-05-08 12:38:03 | |
| 0001102934-20-000028-index.html | 2020-05-08 12:38:03 | |
| 0001102934-20-000028.txt | 2020-05-08 12:38:03 | |
 0001102934-20-000028-xbrl.zip | 458659 | 2020-05-08 12:38:03 |
| ccmp-20200331.htm | 2544332 | 2020-05-08 12:38:03 |
| ccmp-20200331.xsd | 49331 | 2020-05-08 12:38:03 |
| ccmp-20200331xex311.htm | 11161 | 2020-05-08 12:38:03 |
| ccmp-20200331xex312.htm | 11138 | 2020-05-08 12:38:03 |
| ccmp-20200331xex321.htm | 8368 | 2020-05-08 12:38:03 |
| ccmp-20200331_cal.xml | 129550 | 2020-05-08 12:38:03 |
| ccmp-20200331_def.xml | 294518 | 2020-05-08 12:38:03 |
| ccmp-20200331_htm.xml | 2233934 | 2020-05-08 12:38:03 |
| ccmp-20200331_lab.xml | 698966 | 2020-05-08 12:38:03 |
| ccmp-20200331_pre.xml | 474710 | 2020-05-08 12:38:03 |
| ex1072-basic_planxdocume.htm | 482791 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume001.jpg | 75707 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume002.jpg | 226840 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume003.jpg | 241349 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume004.jpg | 264052 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume005.jpg | 257595 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume006.jpg | 51228 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume007.jpg | 256302 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume008.jpg | 290937 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume009.jpg | 285650 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume010.jpg | 274525 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume011.jpg | 318792 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume012.jpg | 282712 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume013.jpg | 283723 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume014.jpg | 266491 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume015.jpg | 268196 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume016.jpg | 319363 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume017.jpg | 350409 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume018.jpg | 325421 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume019.jpg | 327214 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume020.jpg | 324034 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume021.jpg | 328725 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume022.jpg | 310855 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume023.jpg | 228100 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume024.jpg | 315263 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume025.jpg | 242589 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume026.jpg | 284937 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume027.jpg | 259603 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume028.jpg | 228179 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume029.jpg | 273545 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume030.jpg | 312075 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume031.jpg | 339426 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume032.jpg | 323673 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume033.jpg | 335689 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume034.jpg | 316122 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume035.jpg | 303185 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume036.jpg | 266153 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume037.jpg | 273443 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume038.jpg | 308054 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume039.jpg | 307683 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume040.jpg | 334244 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume041.jpg | 358648 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume042.jpg | 324613 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume043.jpg | 278957 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume044.jpg | 290481 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume045.jpg | 333024 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume046.jpg | 338139 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume047.jpg | 303992 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume048.jpg | 347600 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume049.jpg | 299749 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume050.jpg | 303484 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume051.jpg | 296419 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume052.jpg | 291218 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume053.jpg | 299958 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume054.jpg | 294670 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume055.jpg | 287467 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume056.jpg | 333831 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume057.jpg | 319525 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume058.jpg | 268376 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume059.jpg | 332321 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume060.jpg | 345349 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume061.jpg | 314980 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume062.jpg | 329454 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume063.jpg | 302588 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume064.jpg | 282565 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume065.jpg | 294350 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume066.jpg | 362053 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume067.jpg | 301700 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume068.jpg | 330063 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume069.jpg | 261618 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume070.jpg | 356004 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume071.jpg | 320619 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume072.jpg | 343275 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume073.jpg | 285451 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume074.jpg | 286757 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume075.jpg | 295554 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume076.jpg | 318459 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume077.jpg | 315744 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume078.jpg | 84099 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume079.jpg | 254746 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume080.jpg | 93630 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume081.jpg | 143767 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume082.jpg | 195799 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume083.jpg | 247837 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume084.jpg | 265640 | 2020-05-08 12:38:03 |
 ex1072-basic_planxdocume085.jpg | 161846 | 2020-05-08 12:38:03 |
| ex1073-401kadoptionagree.htm | 209920 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree001.jpg | 98980 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree002.jpg | 219676 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree003.jpg | 118093 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree004.jpg | 156425 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree005.jpg | 201928 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree006.jpg | 185682 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree007.jpg | 180428 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree008.jpg | 202164 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree009.jpg | 223542 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree010.jpg | 193522 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree011.jpg | 200354 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree012.jpg | 198088 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree013.jpg | 226484 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree014.jpg | 206978 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree015.jpg | 248100 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree016.jpg | 220723 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree017.jpg | 243107 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree018.jpg | 195595 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree019.jpg | 194922 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree020.jpg | 209703 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree021.jpg | 172837 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree022.jpg | 186969 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree023.jpg | 147485 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree024.jpg | 180232 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree025.jpg | 184148 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree026.jpg | 236266 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree027.jpg | 206216 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree028.jpg | 156455 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree029.jpg | 108776 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree030.jpg | 64328 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree031.jpg | 82667 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree032.jpg | 130209 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree033.jpg | 61541 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree034.jpg | 139603 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree035.jpg | 153268 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree036.jpg | 118283 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree037.jpg | 150410 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree038.jpg | 219244 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree039.jpg | 247137 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree040.jpg | 213816 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree041.jpg | 55400 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree042.jpg | 165928 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree043.jpg | 49295 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree044.jpg | 165101 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree045.jpg | 87944 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree046.jpg | 118309 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree047.jpg | 73729 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree048.jpg | 61628 | 2020-05-08 12:38:03 |
 ex1073-401kadoptionagree049.jpg | 79696 | 2020-05-08 12:38:03 |
| FilingSummary.xml | 46768 | 2020-05-08 12:38:03 |
| Financial_Report.xlsx | 92411 | 2020-05-08 12:38:03 |
| MetaLinks.json | 684815 | 2020-05-08 12:38:03 |
| R1.htm | 52230 | 2020-05-08 12:38:03 |
| R10.htm | 10477 | 2020-05-08 12:38:03 |
| R11.htm | 19269 | 2020-05-08 12:38:03 |
| R12.htm | 62793 | 2020-05-08 12:38:03 |
| R13.htm | 92826 | 2020-05-08 12:38:03 |
| R14.htm | 16156 | 2020-05-08 12:38:03 |
| R15.htm | 101680 | 2020-05-08 12:38:03 |
| R16.htm | 20065 | 2020-05-08 12:38:03 |
| R17.htm | 32142 | 2020-05-08 12:38:03 |
| R18.htm | 21769 | 2020-05-08 12:38:03 |
| R19.htm | 31687 | 2020-05-08 12:38:03 |
| R2.htm | 50419 | 2020-05-08 12:38:03 |
| R20.htm | 58912 | 2020-05-08 12:38:03 |
| R21.htm | 18448 | 2020-05-08 12:38:03 |
| R22.htm | 84843 | 2020-05-08 12:38:03 |
| R23.htm | 44376 | 2020-05-08 12:38:03 |
| R24.htm | 6025 | 2020-05-08 12:38:03 |
| R25.htm | 72879 | 2020-05-08 12:38:03 |
| R26.htm | 142806 | 2020-05-08 12:38:03 |
| R27.htm | 14439 | 2020-05-08 12:38:03 |
| R28.htm | 18950 | 2020-05-08 12:38:03 |
| R29.htm | 57249 | 2020-05-08 12:38:03 |
| R3.htm | 22585 | 2020-05-08 12:38:03 |
| R30.htm | 89138 | 2020-05-08 12:38:03 |
| R31.htm | 17175 | 2020-05-08 12:38:03 |
| R32.htm | 103552 | 2020-05-08 12:38:03 |
| R33.htm | 20285 | 2020-05-08 12:38:03 |
| R34.htm | 32252 | 2020-05-08 12:38:03 |
| R35.htm | 14156 | 2020-05-08 12:38:03 |
| R36.htm | 32353 | 2020-05-08 12:38:03 |
| R37.htm | 56901 | 2020-05-08 12:38:03 |
| R38.htm | 83576 | 2020-05-08 12:38:03 |
| R39.htm | 38790 | 2020-05-08 12:38:03 |
| R4.htm | 74928 | 2020-05-08 12:38:03 |
| R40.htm | 71502 | 2020-05-08 12:38:03 |
| R41.htm | 140702 | 2020-05-08 12:38:03 |
| R42.htm | 4296 | 2020-05-08 12:38:03 |
| R43.htm | 14312 | 2020-05-08 12:38:03 |
| R44.htm | 11602 | 2020-05-08 12:38:03 |
| R45.htm | 13666 | 2020-05-08 12:38:03 |
| R46.htm | 68458 | 2020-05-08 12:38:03 |
| R47.htm | 13778 | 2020-05-08 12:38:03 |
| R48.htm | 37428 | 2020-05-08 12:38:03 |
| R49.htm | 36121 | 2020-05-08 12:38:03 |
| R5.htm | 15686 | 2020-05-08 12:38:03 |
| R50.htm | 12825 | 2020-05-08 12:38:03 |
| R51.htm | 26512 | 2020-05-08 12:38:03 |
| R52.htm | 12157 | 2020-05-08 12:38:03 |
| R53.htm | 14503 | 2020-05-08 12:38:03 |
| R54.htm | 22211 | 2020-05-08 12:38:03 |
| R55.htm | 5650 | 2020-05-08 12:38:03 |
| R56.htm | 13148 | 2020-05-08 12:38:03 |
| R57.htm | 14452 | 2020-05-08 12:38:03 |
| R58.htm | 30551 | 2020-05-08 12:38:03 |
| R59.htm | 70942 | 2020-05-08 12:38:03 |
| R6.htm | 97168 | 2020-05-08 12:38:03 |
| R60.htm | 20802 | 2020-05-08 12:38:03 |
| R61.htm | 18968 | 2020-05-08 12:38:03 |
| R62.htm | 23715 | 2020-05-08 12:38:03 |
| R63.htm | 19527 | 2020-05-08 12:38:03 |
| R64.htm | 18685 | 2020-05-08 12:38:03 |
| R65.htm | 18294 | 2020-05-08 12:38:03 |
| R66.htm | 8299 | 2020-05-08 12:38:03 |
| R67.htm | 26248 | 2020-05-08 12:38:03 |
| R68.htm | 39242 | 2020-05-08 12:38:03 |
| R69.htm | 14571 | 2020-05-08 12:38:03 |
| R7.htm | 70906 | 2020-05-08 12:38:03 |
| R70.htm | 16985 | 2020-05-08 12:38:03 |
| R71.htm | 5279 | 2020-05-08 12:38:03 |
| R72.htm | 32144 | 2020-05-08 12:38:03 |
| R73.htm | 6510 | 2020-05-08 12:38:03 |
| R74.htm | 17263 | 2020-05-08 12:38:03 |
| R75.htm | 12957 | 2020-05-08 12:38:03 |
| R76.htm | 32401 | 2020-05-08 12:38:03 |
| R8.htm | 4747 | 2020-05-08 12:38:03 |
| R9.htm | 10731 | 2020-05-08 12:38:03 |
| R9999.htm | 4623 | 2020-05-08 12:38:03 |
| report.css | 2768 | 2020-05-08 12:38:03 |
| Show.js | 1086 | 2020-05-08 12:38:03 |