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| 0001558370-21-014119-index.html | 2021-11-02 16:31:09 | |
| 0001558370-21-014119.txt | 2021-11-02 16:31:09 | |
 0001558370-21-014119-xbrl.zip | 249953 | 2021-11-02 16:31:09 |
| FilingSummary.xml | 35598 | 2021-11-02 16:31:09 |
| Financial_Report.xlsx | 89839 | 2021-11-02 16:31:09 |
| MetaLinks.json | 698085 | 2021-11-02 16:31:09 |
| R1.htm | 52165 | 2021-11-02 16:31:09 |
| R10.htm | 138812 | 2021-11-02 16:31:09 |
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| R20.htm | 118452 | 2021-11-02 16:31:09 |
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| R22.htm | 225999 | 2021-11-02 16:31:09 |
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| R25.htm | 119218 | 2021-11-02 16:31:09 |
| R26.htm | 4192 | 2021-11-02 16:31:09 |
| R27.htm | 4852 | 2021-11-02 16:31:09 |
| R28.htm | 15498 | 2021-11-02 16:31:09 |
| R29.htm | 39499 | 2021-11-02 16:31:09 |
| R3.htm | 19577 | 2021-11-02 16:31:09 |
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| R36.htm | 24158 | 2021-11-02 16:31:09 |
| R37.htm | 25057 | 2021-11-02 16:31:09 |
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| R6.htm | 102165 | 2021-11-02 16:31:09 |
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| report.css | 2767 | 2021-11-02 16:31:09 |
| Show.js | 1085 | 2021-11-02 16:31:09 |
| veco-20210930.xsd | 50369 | 2021-11-02 16:31:09 |
| veco-20210930x10q.htm | 2277970 | 2021-11-02 16:31:09 |
| veco-20210930x10q_htm.xml | 2396574 | 2021-11-02 16:31:09 |
| veco-20210930xex31d1.htm | 15026 | 2021-11-02 16:31:09 |
| veco-20210930xex31d2.htm | 13154 | 2021-11-02 16:31:09 |
| veco-20210930xex32d1.htm | 8893 | 2021-11-02 16:31:09 |
| veco-20210930xex32d2.htm | 8830 | 2021-11-02 16:31:09 |
| veco-20210930_cal.xml | 77550 | 2021-11-02 16:31:09 |
| veco-20210930_def.xml | 201429 | 2021-11-02 16:31:09 |
| veco-20210930_lab.xml | 524103 | 2021-11-02 16:31:09 |
| veco-20210930_pre.xml | 372019 | 2021-11-02 16:31:09 |