Parent Directory| Name | Size | Last Modified |
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| 0001104659-24-059911-index.html | 2024-05-10 16:15:43 | |
| 0001104659-24-059911.txt | 2024-05-10 16:15:43 | |
 0001104659-24-059911-xbrl.zip | 11033 | 2024-05-10 16:15:43 |
| FilingSummary.xml | 1640 | 2024-05-10 16:15:43 |
| Financial_Report.xlsx | 5681 | 2024-05-10 16:15:43 |
| MetaLinks.json | 39008 | 2024-05-10 16:15:43 |
| R1.htm | 38081 | 2024-05-10 16:15:43 |
| report.css | 2766 | 2024-05-10 16:15:43 |
| Show.js | 1084 | 2024-05-10 16:15:43 |
| tm2414088d1_8k.htm | 35295 | 2024-05-10 16:15:43 |
| tm2414088d1_8k_htm.xml | 3555 | 2024-05-10 16:15:43 |
| veco-20240509.xsd | 3006 | 2024-05-10 16:15:43 |
| veco-20240509_lab.xml | 34240 | 2024-05-10 16:15:43 |
| veco-20240509_pre.xml | 22353 | 2024-05-10 16:15:43 |