Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-23-061602-index-headers.html | 2023-05-17 07:06:34 | |
| 0001104659-23-061602-index.html | 2023-05-17 07:06:34 | |
| 0001104659-23-061602.txt | 2023-05-17 07:06:34 | |
 0001104659-23-061602-xbrl.zip | 14569 | 2023-05-17 07:06:34 |
| FilingSummary.xml | 1644 | 2023-05-17 07:06:34 |
| Financial_Report.xlsx | 5680 | 2023-05-17 07:06:34 |
| MetaLinks.json | 39134 | 2023-05-17 07:06:34 |
| R1.htm | 38075 | 2023-05-17 07:06:34 |
| report.css | 2767 | 2023-05-17 07:06:34 |
| Show.js | 1085 | 2023-05-17 07:06:34 |
| tm2315518d4_8k.htm | 26245 | 2023-05-17 07:06:34 |
| tm2315518d4_8k_htm.xml | 3481 | 2023-05-17 07:06:34 |
| tm2315518d4_ex99-1.htm | 12717 | 2023-05-17 07:06:34 |
 tm2315518d4_ex99-1img01.jpg | 7085 | 2023-05-17 07:06:34 |
| veco-20230517.xsd | 3024 | 2023-05-17 07:06:34 |
| veco-20230517_lab.xml | 34476 | 2023-05-17 07:06:34 |
| veco-20230517_pre.xml | 22589 | 2023-05-17 07:06:34 |