Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-23-061409-index-headers.html | 2023-05-16 16:26:45 | |
| 0001104659-23-061409-index.html | 2023-05-16 16:26:45 | |
| 0001104659-23-061409.txt | 2023-05-16 16:26:45 | |
 0001104659-23-061409-xbrl.zip | 14201 | 2023-05-16 16:26:45 |
| FilingSummary.xml | 1644 | 2023-05-16 16:26:45 |
| Financial_Report.xlsx | 5679 | 2023-05-16 16:26:45 |
| MetaLinks.json | 39134 | 2023-05-16 16:26:45 |
| R1.htm | 38075 | 2023-05-16 16:26:45 |
| report.css | 2767 | 2023-05-16 16:26:45 |
| Show.js | 1085 | 2023-05-16 16:26:45 |
| tm2315518d3_8k.htm | 26427 | 2023-05-16 16:26:45 |
| tm2315518d3_8k_htm.xml | 3481 | 2023-05-16 16:26:45 |
| tm2315518d3_ex99-1.htm | 11453 | 2023-05-16 16:26:45 |
 tm2315518d3_ex99-1img001.jpg | 23292 | 2023-05-16 16:26:45 |
| veco-20230516.xsd | 3024 | 2023-05-16 16:26:45 |
| veco-20230516_lab.xml | 34476 | 2023-05-16 16:26:45 |
| veco-20230516_pre.xml | 22589 | 2023-05-16 16:26:45 |