Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-23-059754-index-headers.html | 2023-05-12 16:15:55 | |
| 0001104659-23-059754-index.html | 2023-05-12 16:15:55 | |
| 0001104659-23-059754.txt | 2023-05-12 16:15:55 | |
 0001104659-23-059754-xbrl.zip | 11778 | 2023-05-12 16:15:55 |
| FilingSummary.xml | 1604 | 2023-05-12 16:15:55 |
| Financial_Report.xlsx | 5679 | 2023-05-12 16:15:55 |
| MetaLinks.json | 39134 | 2023-05-12 16:15:55 |
| R1.htm | 38075 | 2023-05-12 16:15:55 |
| report.css | 2766 | 2023-05-12 16:15:55 |
| Show.js | 1084 | 2023-05-12 16:15:55 |
| tm2315518d1_8k.htm | 41911 | 2023-05-12 16:15:55 |
| tm2315518d1_8k_htm.xml | 3481 | 2023-05-12 16:15:55 |
| veco-20230511.xsd | 3024 | 2023-05-12 16:15:55 |
| veco-20230511_lab.xml | 34476 | 2023-05-12 16:15:55 |
| veco-20230511_pre.xml | 22589 | 2023-05-12 16:15:55 |