Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-23-017593-index-headers.html | 2023-02-09 16:15:52 | |
| 0001104659-23-017593-index.html | 2023-02-09 16:15:52 | |
| 0001104659-23-017593.txt | 2023-02-09 16:15:52 | |
 0001104659-23-017593-xbrl.zip | 10653 | 2023-02-09 16:15:52 |
| FilingSummary.xml | 1606 | 2023-02-09 16:15:52 |
| Financial_Report.xlsx | 5683 | 2023-02-09 16:15:52 |
| MetaLinks.json | 39134 | 2023-02-09 16:15:52 |
| R1.htm | 38079 | 2023-02-09 16:15:52 |
| report.css | 2766 | 2023-02-09 16:15:52 |
| Show.js | 1084 | 2023-02-09 16:15:52 |
| tm235992d1_8ka.htm | 23810 | 2023-02-09 16:15:52 |
| tm235992d1_8ka_htm.xml | 3483 | 2023-02-09 16:15:52 |
| veco-20221121.xsd | 3024 | 2023-02-09 16:15:52 |
| veco-20221121_lab.xml | 34476 | 2023-02-09 16:15:52 |
| veco-20221121_pre.xml | 22589 | 2023-02-09 16:15:52 |