Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-23-008966-index-headers.html | 2023-02-01 07:15:31 | |
| 0001104659-23-008966-index.html | 2023-02-01 07:15:31 | |
| 0001104659-23-008966.txt | 2023-02-01 07:15:31 | |
 0001104659-23-008966-xbrl.zip | 13999 | 2023-02-01 07:15:31 |
| FilingSummary.xml | 1640 | 2023-02-01 07:15:31 |
| Financial_Report.xlsx | 5682 | 2023-02-01 07:15:31 |
| MetaLinks.json | 39130 | 2023-02-01 07:15:31 |
| R1.htm | 38078 | 2023-02-01 07:15:31 |
| report.css | 2767 | 2023-02-01 07:15:31 |
| Show.js | 1085 | 2023-02-01 07:15:31 |
| tm235070d1_8k.htm | 26754 | 2023-02-01 07:15:31 |
| tm235070d1_8k_htm.xml | 3481 | 2023-02-01 07:15:31 |
| tm235070d1_ex99-1.htm | 9802 | 2023-02-01 07:15:31 |
 tm235070d1_ex99-1img01.jpg | 5469 | 2023-02-01 07:15:31 |
| veco-20230201.xsd | 3024 | 2023-02-01 07:15:31 |
| veco-20230201_lab.xml | 34476 | 2023-02-01 07:15:31 |
| veco-20230201_pre.xml | 22589 | 2023-02-01 07:15:31 |