Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-22-104596-index-headers.html | 2022-09-30 16:17:11 | |
| 0001104659-22-104596-index.html | 2022-09-30 16:17:11 | |
| 0001104659-22-104596.txt | 2022-09-30 16:17:11 | |
 0001104659-22-104596-xbrl.zip | 27214 | 2022-09-30 16:17:11 |
| FilingSummary.xml | 1646 | 2022-09-30 16:17:11 |
| Financial_Report.xlsx | 5679 | 2022-09-30 16:17:11 |
| MetaLinks.json | 37820 | 2022-09-30 16:17:11 |
| R1.htm | 38079 | 2022-09-30 16:17:11 |
| report.css | 2767 | 2022-09-30 16:17:11 |
| Show.js | 1084 | 2022-09-30 16:17:11 |
| tm2227014d1_8k.htm | 25747 | 2022-09-30 16:17:11 |
| tm2227014d1_8k_htm.xml | 3481 | 2022-09-30 16:17:11 |
| tm2227014d1_ex99-1.htm | 96469 | 2022-09-30 16:17:11 |
| veco-20220930.xsd | 3024 | 2022-09-30 16:17:11 |
| veco-20220930_lab.xml | 34476 | 2022-09-30 16:17:11 |
| veco-20220930_pre.xml | 22589 | 2022-09-30 16:17:11 |