Parent Directory| Name | Size | Last Modified |
|---|---|---|
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| 0001104659-22-059438-index.html | 2022-05-12 16:14:46 | |
| 0001104659-22-059438.txt | 2022-05-12 16:14:46 | |
 0001104659-22-059438-xbrl.zip | 11449 | 2022-05-12 16:14:46 |
| FilingSummary.xml | 1604 | 2022-05-12 16:14:46 |
| Financial_Report.xlsx | 5657 | 2022-05-12 16:14:46 |
| MetaLinks.json | 37820 | 2022-05-12 16:14:46 |
| R1.htm | 38682 | 2022-05-12 16:14:46 |
| report.css | 2766 | 2022-05-12 16:14:46 |
| Show.js | 1084 | 2022-05-12 16:14:46 |
| tm2215396d1_8k.htm | 39405 | 2022-05-12 16:14:46 |
| tm2215396d1_8k_htm.xml | 3481 | 2022-05-12 16:14:46 |
| veco-20220512.xsd | 3024 | 2022-05-12 16:14:46 |
| veco-20220512_lab.xml | 34476 | 2022-05-12 16:14:46 |
| veco-20220512_pre.xml | 22589 | 2022-05-12 16:14:46 |