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|---|---|---|
 0001104659-21-151696-index-headers.html | 2021-12-20 16:15:17 | |
| 0001104659-21-151696-index.html | 2021-12-20 16:15:17 | |
| 0001104659-21-151696.txt | 2021-12-20 16:15:17 | |
 0001104659-21-151696-xbrl.zip | 176475 | 2021-12-20 16:15:17 |
| FilingSummary.xml | 1672 | 2021-12-20 16:15:17 |
| Financial_Report.xlsx | 5656 | 2021-12-20 16:15:17 |
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| R1.htm | 38560 | 2021-12-20 16:15:17 |
| report.css | 2767 | 2021-12-20 16:15:17 |
| Show.js | 1085 | 2021-12-20 16:15:17 |
| tm2135782d1_8k.htm | 33232 | 2021-12-20 16:15:17 |
| tm2135782d1_8k_htm.xml | 3479 | 2021-12-20 16:15:17 |
| tm2135782d1_ex10-1.htm | 958335 | 2021-12-20 16:15:17 |
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| veco-20211216.xsd | 3016 | 2021-12-20 16:15:17 |
| veco-20211216_lab.xml | 34240 | 2021-12-20 16:15:17 |
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