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|---|---|---|
 0001104659-21-135409-index-headers.html | 2021-11-08 09:10:24 | |
| 0001104659-21-135409-index.html | 2021-11-08 09:10:24 | |
| 0001104659-21-135409.txt | 2021-11-08 09:10:24 | |
 0001104659-21-135409-xbrl.zip | 20744 | 2021-11-08 09:10:24 |
| FilingSummary.xml | 1677 | 2021-11-08 09:10:24 |
| Financial_Report.xlsx | 5659 | 2021-11-08 09:10:24 |
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| R1.htm | 38600 | 2021-11-08 09:10:24 |
| report.css | 2767 | 2021-11-08 09:10:24 |
| Show.js | 1085 | 2021-11-08 09:10:24 |
| tm2132183d1_8k.htm | 27883 | 2021-11-08 09:10:24 |
| tm2132183d1_8k_htm.xml | 3485 | 2021-11-08 09:10:24 |
| tm2132183d1_ex10-1.htm | 32698 | 2021-11-08 09:10:24 |
| tm2132183d1_ex99-1.htm | 7627 | 2021-11-08 09:10:24 |
 tm2132183d1_ex99-1img001.jpg | 21814 | 2021-11-08 09:10:24 |
| veco-20211105.xsd | 3180 | 2021-11-08 09:10:24 |
| veco-20211105_lab.xml | 34594 | 2021-11-08 09:10:24 |
| veco-20211105_pre.xml | 22707 | 2021-11-08 09:10:24 |