Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-131774-index-headers.html | 2021-10-29 16:01:52 | |
| 0001104659-21-131774-index.html | 2021-10-29 16:01:52 | |
| 0001104659-21-131774.txt | 2021-10-29 16:01:52 | |
 0001104659-21-131774-xbrl.zip | 10698 | 2021-10-29 16:01:52 |
| FilingSummary.xml | 1602 | 2021-10-29 16:01:52 |
| Financial_Report.xlsx | 6037 | 2021-10-29 16:01:52 |
| MetaLinks.json | 38265 | 2021-10-29 16:01:52 |
| R1.htm | 40917 | 2021-10-29 16:01:52 |
| report.css | 2766 | 2021-10-29 16:01:52 |
| Show.js | 1084 | 2021-10-29 16:01:52 |
| tm2131205d1_8ka.htm | 23517 | 2021-10-29 16:01:52 |
| tm2131205d1_8ka_htm.xml | 4397 | 2021-10-29 16:01:52 |
| veco-20210813.xsd | 3180 | 2021-10-29 16:01:52 |
| veco-20210813_lab.xml | 34594 | 2021-10-29 16:01:52 |
| veco-20210813_pre.xml | 22707 | 2021-10-29 16:01:52 |