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 0001104659-21-027481-index-headers.html | 2021-02-24 16:15:25 | |
| 0001104659-21-027481-index.html | 2021-02-24 16:15:25 | |
| 0001104659-21-027481.txt | 2021-02-24 16:15:25 | |
 0001104659-21-027481-xbrl.zip | 111283 | 2021-02-24 16:15:25 |
| FilingSummary.xml | 1633 | 2021-02-24 16:15:25 |
| Financial_Report.xlsx | 5439 | 2021-02-24 16:15:25 |
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| R1.htm | 38600 | 2021-02-24 16:15:25 |
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| Show.js | 1085 | 2021-02-24 16:15:25 |
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| veco-20210218_pre.xml | 22705 | 2021-02-24 16:15:25 |