Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-006663-index-headers.html | 2021-01-22 16:05:51 | |
| 0001104659-21-006663-index.html | 2021-01-22 16:05:51 | |
| 0001104659-21-006663.txt | 2021-01-22 16:05:51 | |
 0001104659-21-006663-xbrl.zip | 44462 | 2021-01-22 16:05:51 |
| FilingSummary.xml | 1670 | 2021-01-22 16:05:51 |
| Financial_Report.xlsx | 5465 | 2021-01-22 16:05:51 |
| MetaLinks.json | 38458 | 2021-01-22 16:05:51 |
| R1.htm | 40137 | 2021-01-22 16:05:51 |
| report.css | 2767 | 2021-01-22 16:05:51 |
| Show.js | 1085 | 2021-01-22 16:05:51 |
| tm213806d1_8k.htm | 27407 | 2021-01-22 16:05:51 |
| tm213806d1_8k_htm.xml | 3598 | 2021-01-22 16:05:51 |
| tm213806d1_ex3-1.htm | 94304 | 2021-01-22 16:05:51 |
| tm213806d1_ex3-2.htm | 95086 | 2021-01-22 16:05:51 |
| veco-20210122.xsd | 3178 | 2021-01-22 16:05:51 |
| veco-20210122_lab.xml | 34592 | 2021-01-22 16:05:51 |
| veco-20210122_pre.xml | 22705 | 2021-01-22 16:05:51 |