Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001193125-21-315385-index-headers.html | 2021-11-01 16:06:59 | |
| 0001193125-21-315385-index.html | 2021-11-01 16:06:59 | |
| 0001193125-21-315385.txt | 2021-11-01 16:06:59 | |
 0001193125-21-315385-xbrl.zip | 17388 | 2021-11-01 16:06:59 |
| d219274d8k.htm | 24820 | 2021-11-01 16:06:59 |
| d219274d8k_htm.xml | 3263 | 2021-11-01 16:06:59 |
| d219274dex991.htm | 118077 | 2021-11-01 16:06:59 |
| FilingSummary.xml | 1726 | 2021-11-01 16:06:59 |
| Financial_Report.xlsx | 5670 | 2021-11-01 16:06:59 |
 g219274dsp04.jpg | 2281 | 2021-11-01 16:06:59 |
| ivac-20211101.xsd | 2889 | 2021-11-01 16:06:59 |
| ivac-20211101_lab.xml | 17374 | 2021-11-01 16:06:59 |
| ivac-20211101_pre.xml | 10951 | 2021-11-01 16:06:59 |
| MetaLinks.json | 17937 | 2021-11-01 16:06:59 |
| R1.htm | 38607 | 2021-11-01 16:06:59 |
| report.css | 2767 | 2021-11-01 16:06:59 |
| Show.js | 1085 | 2021-11-01 16:06:59 |