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Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001209191-22-012247
Filing Date
2022-02-23
Accepted
2022-02-23 16:38:35
Documents
2
Period of Report
2022-02-23

Document Format Files

Seq Description Document Type Size
1 FORM 3 SUBMISSION doc3.html 3  
1 FORM 3 SUBMISSION doc3.xml 3 2406
2 EX-24.1 DOCUMENT attachment1.htm EX-24.1 2413
  Complete submission text file 0001209191-22-012247.txt   6275
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
Vachani Dipti (Reporting) CIK: 0001908816 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 22664442