0001209191-22-012247.txt : 20220223 0001209191-22-012247.hdr.sgml : 20220223 20220223163835 ACCESSION NUMBER: 0001209191-22-012247 CONFORMED SUBMISSION TYPE: 3 PUBLIC DOCUMENT COUNT: 2 CONFORMED PERIOD OF REPORT: 20220223 FILED AS OF DATE: 20220223 DATE AS OF CHANGE: 20220223 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Vachani Dipti CENTRAL INDEX KEY: 0001908816 FILING VALUES: FORM TYPE: 3 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 22664442 MAIL ADDRESS: STREET 1: AXCELIS TECHNOLOGIES, INC. STREET 2: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 3 1 doc3.xml FORM 3 SUBMISSION X0206 3 2022-02-23 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001908816 Vachani Dipti C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 0 D Ms. Vachani did not own any reportable securities, directly or indirectly, prior to becoming a reporting person. A Power of Attorney is filed as Exhibit 24.1 to this Form 3. Lynnette C. Fallon, as attorney in fact for Dipti Vachani 2022-02-23 EX-24.1 2 attachment1.htm EX-24.1 DOCUMENT


POWER OF ATTORNEY
For Executing Reports under Section 16(a)
with respect to securities of
AXCELIS TECHNOLOGIES INC.
	The undersigned hereby constitutes and appoints each of Mary G. Puma, Lynnette
C. Fallon, and Megan Gates, Esq., of the Mintz Levin law firm, each acting
singly, the undersigned s true and lawful attorney-in-fact, from the date hereof
until this Power of Attorney is revoked, to:
(1)	execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect
to securities of Axcelis Technologies, Inc. in accordance with Section 16(a) of
the Securities Exchange Act of 1934 and the rules thereunder, it being
understood that the documents executed by such attorney-in-fact on behalf of the
undersigned pursuant to this Power of Attorney shall be in such form and shall
contain such terms and conditions as such attorney-in-fact may approve in his or
her discretion; and
(2)	do and perform any and all acts, for and on behalf of the undersigned, that
may be necessary or desirable to complete the execution of any such Form 3, 4 or
5 and the timely filing of such form with the United States Securities and
Exchange Commission and any other authority.
	The undersigned hereby grants to each such attorney-in-fact full power and
authority to do and perform all and every act and thing whatsoever requisite,
necessary and proper to be done in the exercise of any of the rights and powers
herein granted, as fully for all intents and purposes as the undersigned might
or could do if personally present, with full power of substitution or
revocation, hereby ratifying and confirming all that such attorney-in-fact, or
his or her substitute or substitutes, shall lawfully do or cause to be done by
virtue of this power of attorney and the rights and powers herein granted.  The
undersigned acknowledges that the foregoing attorneys-in-fact, in serving in
such capacity at the request of the undersigned, are not assuming any of the
undersigned s responsibilities to comply with Section 16 of the Securities
Exchange Act of 1934.
	IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be
executed this 13th day of January, 2022.



						_/s/ Dipti Vachani____________________
						Dipti Vachani