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Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 9999999997-11-007115
Filing Date
2011-03-30
Accepted
2011-04-04 09:48:32
Documents
1
Period of Report
2010-12-31
Effectiveness Date
2011-03-30

Document Format Files

Seq Description Document Type Size
1 AUTO-GENERATED PAPER DOCUMENT 9999999997-11-007115.paper ARS 290
  Scanned paper document scanned.pdf   5105704
  Complete submission text file 9999999997-11-007115.txt   1415
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 11005149
SIC: 3559 Special Industry Machinery, NEC