9999999997-11-007115.txt : 20110404
9999999997-11-007115.hdr.sgml : 20110404
20110404094832
ACCESSION NUMBER: 9999999997-11-007115
CONFORMED SUBMISSION TYPE: ARS
PUBLIC DOCUMENT COUNT: 1
CONFORMED PERIOD OF REPORT: 20101231
FILED AS OF DATE: 20110330
DATE AS OF CHANGE: 20110404
EFFECTIVENESS DATE: 20110330
FILER:
COMPANY DATA:
COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC
CENTRAL INDEX KEY: 0001113232
STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559]
IRS NUMBER: 341818596
STATE OF INCORPORATION: DE
FISCAL YEAR END: 1231
FILING VALUES:
FORM TYPE: ARS
SEC ACT: 1934 Act
SEC FILE NUMBER: 000-30941
FILM NUMBER: 11005149
BUSINESS ADDRESS:
STREET 1: 108 CHERRY HILL DRIVE
CITY: BEVERLY
STATE: MA
ZIP: 01915
BUSINESS PHONE: 978 232 4001
MAIL ADDRESS:
STREET 1: 108 CHERRY HILL DRIVE
CITY: BEVERLY
STATE: MA
ZIP: 01915
FORMER COMPANY:
FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC
DATE OF NAME CHANGE: 20000501
ARS
1
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