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Filing Detail
Form 10-K405 - Annual report [Sections 13 and 15(d), S-K Item 405]:
SEC Accession No. 0001113232-02-000002
Filing Date
2002-03-12
Accepted
2002-03-12 00:00:00
Documents
6
Period of Report
2001-12-31

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. FORM 10-K form10k.htm 10-K405 497307
3 EXHIBIT 3.2 ex3_2.txt EX-3 52884
4 EXHIBIT 10.6 ex10_6.txt EX-10 35133
5 EXHIBIT 21.1 ex21_1.txt EX-21 1537
6 EXHIBIT 23.1 ex23_1.txt EX-23 748
7 EXHIBIT 99 ex99.txt EX-99 28159
  Complete submission text file 0001113232-02-000002.txt   617782
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K405 | Act: 34 | File No.: 000-30941 | Film No.: 02573210
SIC: 3559 Special Industry Machinery, NEC