EXHIBIT 23.1



               CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS

    We consent to the incorporation by reference in the Registration Statement
(Form S-8 No. 333-49726) pertaining to the Axcelis Technologies, Inc. Employee
Stock Purchase Plan and the Registration Statement (Form S-8 No. 333-46768)
pertaining to the Axcelis Technologies, Inc. 2000 Stock Plan, of our report
dated January 22, 2002, with respect to the consolidated financial statements
and schedule of Axcelis Technologies, Inc. included in the Annual Report (Form
10-K) for the year ended December 31, 2001.




                                        /s/ ERNST & YOUNG LLP

March 8, 2002