SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form S-3 - Registration statement under Securities Act of 1933:
SEC Accession No. 0000927016-02-001776
Filing Date
2002-03-29
Accepted
2002-03-29 00:00:00
Documents
5

Document Format Files

Seq Description Document Type Size
1 FORM S-3 ds3.txt S-3 110323
3 OPINION OF PALMER & DODGE LLP dex5.txt EX-5 3208
4 STATEMENT REG. COMPUTATION OF RATIO OF EARNINGS dex12.txt EX-12 3138
5 CONSENT OF ERNST & YOUNG LLP dex231.txt EX-23.1 949
6 STATEMENT OF ELIGIBILITY AND QUALIFICATIONS dex25.txt EX-25 17212
  Complete submission text file 0000927016-02-001776.txt   136757
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-3 | Act: 33 | File No.: 333-85214 | Film No.: 02594364
SIC: 3559 Special Industry Machinery, NEC