EXHIBIT 23.1

               CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS

We consent to the reference to our firm under the caption "Experts" in the
Registration Statement on Form S-3 and related Prospectus of Axcelis
Technologies, Inc. for the registration of $125,000,000 principal amount of
Axcelis Technologies, Inc.'s 4 1/4% Convertible Subordinated Notes Due January
15, 2007 and 6,250,000 shares of Axcelis Technologies, Inc. common stock and to
the incorporation by reference therein of our report dated January 22, 2002,
with respect to the consolidated financial statements and schedule of Axcelis
Technologies, Inc. included in its Annual Report (Form 10-K) for the year ended
December 31, 2001, filed with the Securities and Exchange Commission.

                                            /s/ Ernst & Young LLP

Boston, Massachusetts
March 26, 2002