Lundberg Barbara J (0001605861)

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 Ownership Reports for Issuers: (Click on issuer name to see other owners for the issuer, or CIK for issuer filings.) Issuer Filings Transaction Date Type of Owner AXCELIS TECHNOLOGIES INC 0001113232 2014-05-13 director

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You should consult the original filing for complete information. Hyperlinks to the forms are provided for your convenience.

Acquistion or Disposition	Transaction Date	Deemed Execution Date	Issuer	Form	Transaction Type	Direct or Indirect Ownership	Number of Securities Transacted	Number of Securities Owned	Line Number	Issuer CIK	Security Name
D	2016-12-12		AXCELIS TECHNOLOGIES INC	4	S-Sale	--D	1500.0000	15762.0000	1	0001113232	Common Stock
D	2016-12-12		AXCELIS TECHNOLOGIES INC	4	S-Sale	--D	4800.0000	10962.0000	2	0001113232	Common Stock
D	2016-12-12		AXCELIS TECHNOLOGIES INC	4	S-Sale	--D	700.0000	10262.0000	3	0001113232	Common Stock
A	2016-05-16		AXCELIS TECHNOLOGIES INC	4	A-Award	--D	30545.0000	91545.0000	1	0001113232	Common Stock
A	2015-07-15		AXCELIS TECHNOLOGIES INC	4	A-Award	--D	16000.0000	61000.0000	1	0001113232	Common Stock
A	2014-11-17		AXCELIS TECHNOLOGIES INC	4	A-Award	--D	45000.0000	45000.0000	1	0001113232	Common Stock
A	2014-07-15		AXCELIS TECHNOLOGIES INC	4	A-Award	--D	40000.0000	40000.0000	1	0001113232	Stock Option (right to buy)
-	-		AXCELIS TECHNOLOGIES INC	3	-	---			1	-	-

http://www.sec.gov/cgi-bin/own-disp

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