Exhibit 5.1

                                 ATER WYNNE LLP
                          222 S.W. Columbia, Suite 1800
                             Portland, Oregon 97201
                              (503)226-1191 (phone)
                               (503)226-0079 (fax)

                                December 1, 2000




     Board of Directors
     Integrated Measurement Systems, Inc.
     9525 SW Gemini Drive
     Beaverton, OR 97008

     Gentlemen:

         In connection with the registration of 750,000 shares of common stock,
     par value $.01 per share (the "Common Stock"), of Integrated Measurement
     Systems, Inc., an Oregon corporation (the "Company"), under the
     Registration Statement on Form S-8 to be filed with the Securities and
     Exchange Commission on December 1, 2000 and the proposed offer and sale of
     the Common Stock pursuant to the terms of the Company's 2000 Nonqualified
     Stock Option Plan (the "Plan") we have examined such corporate records,
     certificates of public officials and officers of the Company and other
     documents as we have considered necessary or proper for the purpose of this
     opinion.

         Based on the foregoing and having regard to legal issues which we deem
     relevant, it is our opinion that the shares of Common Stock to be offered
     pursuant to the Plan when such shares have been delivered against payment
     therefor as contemplated by the Plan, will be validly issued, fully paid
     and non-assessable.

         We hereby consent to the filing of this opinion as an exhibit to the
above-mentioned registration statement.

                                            Very truly yours,

                                            /s/ Ater Wynne LLP

                                            Ater Wynne LLP