Exhibit 99.4

ASML Announces Update of its Share Buyback Program

VELDHOVEN, the Netherlands, February 20, 2007 — ASML Holding NV (ASML) today announced progress in connection with its share buyback program disclosed on February 14, 2007 as follows:

• To effect the share buyback, ASML has entered into an agreement with a bank. Under the terms of the agreement, the exact number of shares that are to be purchased by the bank and delivered to ASML, as well as timing of the purchases, is left to the discretion of the bank, within pre-agreed ranges.

• During the period from February 14 through February 16, 2007, ASML acquired 3,275,000 of its shares pursuant to the share buyback program, at an average price of EUR 19.62 per share.

• The aggregate number of shares bought back up to and including February 16, 2007 represents 40.9 percent of the announced objective of the remaining 1.7 percent of outstanding ordinary shares (equal to 8 million shares) as authorized by the Annual General Meeting of Shareholders on March 23, 2006.

• ASML’s share buyback program was announced on February 14, 2007 and will terminate on March 27, 2007.

• The repurchased shares will be used to cover outstanding stock options.

About ASML

ASML is the world’s leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or chips. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML.

Media Relations Contacts
Angelique Paulussen — Corporate Communications — +31 40 268 6572 — Veldhoven, the Netherlands

Investor Relations Contacts
Craig DeYoung — Investor Relations — +1 408 383 4005 — Tempe, Arizona
Franki D’Hoore — Investor Relations — +31 40 268 6494 — Veldhoven, the Netherlands