Commitments and Contingencies - Contingencies (Details) - Edwards Vacuum LLC, Indemnification, Definitive Agreement, Third-party Warranty Claim - USD ($) $ in Millions	1 Months Ended		3 Months Ended
	Apr. 30, 2023	Jan. 31, 2023	Jun. 30, 2023	Mar. 31, 2024	Mar. 31, 2023
Loss Contingency, Information about Litigation Matters [Abstract]
Loss contingency, damages sought, value		$ 1.0
Loss Contingency Accrual, Disclosures [Abstract]
Loss contingency accrual					$ 2.5
Settled Litigation
Loss Contingency Accrual, Disclosures [Abstract]
Loss contingency accrual				$ 1.7
Loss contingency payment	$ 0.8		$ 0.8