CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	3 Months Ended
	Dec. 31, 2023	Dec. 31, 2022
Cash flows from operating activities
Net loss	$ (15,724)	$ (11,235)
Adjustments to reconcile net loss to net cash provided by operating activities:
Depreciation and amortization	21,866	20,181
Stock-based compensation	3,202	2,105
Amortization and accretion on marketable securities	(704)	(3,104)
Deferred income taxes	(7,317)	(6,325)
Purchase accounting impact on inventory		2,869
Loss on disposals of property, plant and equipment	266	17
Changes in operating assets and liabilities:
Accounts receivable	2,830	(12,141)
Inventories	4,542	(5,923)
Accounts payable	3,457	4,952
Deferred revenue	(321)	(59)
Accrued warranty and retrofit costs	(554)	504
Accrued compensation and tax withholdings	(979)	(14,015)
Accrued restructuring costs	(90)	1,139
Other assets and liabilities	15,957	(5,985)
Net cash provided by (used in) operating activities	26,431	(27,020)
Cash flows from investing activities
Purchases of property, plant and equipment	(11,919)	(12,842)
Purchases of marketable securities		(166,374)
Sales and maturities of marketable securities	110,316	607,205
Acquisitions, net of cash acquired		(371,633)
Net cash provided by investing activities	98,397	56,356
Cash flows from financing activities
Payments of finance leases	(198)	(91)
Withholding tax payments on net share settlements on equity awards	(2)	(4,629)
Share repurchases	(112,953)	(500,000)
Net cash used in financing activities	(113,153)	(504,720)
Effects of exchange rate changes on cash and cash equivalents	12,501	49,941
Net increase (decrease) in cash, cash equivalents and restricted cash	24,176	(425,443)
Cash, cash equivalents and restricted cash, beginning of period	684,045	1,041,296
Cash, cash equivalents and restricted cash, end of period	708,221	615,854
Supplemental disclosures:
Cash paid for income taxes, net	$ 2,599	$ 7,291