CONSOLIDATED STATEMENTS OF CASH FLOWS - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2023	Sep. 30, 2022	Sep. 30, 2021
Cash flows from operating activities
Net income (loss)	$ (14,257)	$ 2,132,859	$ 110,747
Adjustments to reconcile net income (loss) to net cash provided by operating activities:
Depreciation and amortization	85,584	53,702	65,333
Impairment of intangible assets			13,364
Stock-based compensation	9,376	10,666	27,456
Contingent consideration adjustment	(18,549)	600
Amortization and accretion on marketable securities	(7,870)	(1,894)	225
Deferred income taxes	(28,654)	24,469	(17,265)
Loss on extinguishment of debt		632
Purchase accounting impact on inventory	9,664
(Gain) loss on disposals of property, plant and equipment	43	(21)	260
(Gain) loss on divestiture, net of tax		(2,130,265)	948
Fees paid stemming from divestiture		(52,461)
Taxes paid stemming from divestiture		(431,600)
Changes in operating assets and liabilities:
Accounts receivable	33,992	(31,397)	(69,643)
Inventories	8,253	(66,629)	(50,443)
Accounts payable	(14,710)	(3,926)	30,967
Deferred revenue	(7,564)	16,599	(3,939)
Accrued warranty and retrofit costs	4,560	303	54
Accrued compensation and tax withholdings	(15,434)	11,404	7,298
Other current assets and liabilities	(26,944)	913	34,495
Net cash provided by (used in) operating activities	17,490	(466,046)	149,857
Cash flows from investing activities
Purchases of property, plant and equipment	(39,436)	(73,435)	(52,805)
Purchases of technology intangibles		(4,000)
Purchases of marketable securities	(236,194)	(1,975,599)	(151)
Sales and maturities of marketable securities	1,064,209	705,384	121
Proceeds from divestiture, net of cash transferred		2,939,116
Adjustment to proceeds from divestiture			(1,802)
Net Investment hedge settlement	29,313
Acquisitions, net of cash acquired	(386,508)	(125,876)	(93,712)
Settlement (issuance) of note receivables			2,000
Net cash provided by (used in) investing activities	431,384	1,465,590	(146,349)
Cash flows from financing activities
Proceeds from issuance of common stock		5,245	5,812
Principal payments on debt		(49,725)	(828)
Payments of finance leases	(578)	(388)	(1,164)
Payment for contingent consideration related to acquisition		(10,400)
Withholding tax payments on net share settlements on equity awards	(4,988)
Stock repurchase	(838,514)
Common stock dividends		(7,494)	(29,726)
Net cash used in financing activities	(844,080)	(62,762)	(25,906)
Effects of exchange rate changes on cash and cash equivalents	37,955	(180,819)	5,205
Net (decrease) increase in cash, cash equivalents and restricted cash	(357,251)	755,963	(17,193)
Cash, cash equivalents and restricted cash, beginning of period	1,041,296	285,333	302,526
Cash, cash equivalents and restricted cash, end of period	684,045	1,041,296	285,333
Supplemental disclosures:
Cash paid for interest		469	1,435
Cash paid for income taxes, net	$ 43,073	$ 452,461	$ 38,020