Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2023	Sep. 30, 2022	Sep. 30, 2021
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ (1,374)	$ 2,144,145	$ 139,616
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		264,430	680,056
Total cost of revenue		152,324	384,536
Gross profit		112,106	295,520
Research and development		18,486	48,647
Selling, general and administrative		30,622	70,634
Restructuring charges			230
Total operating expenses		49,108	119,511
Operating income		62,998	176,009
Gain on divestiture		2,561,820	133
Income before income taxes		2,624,818	176,142
Income tax expense		480,673	35,357
Net income from discontinued operations	$ (1,400)	2,144,145	140,785
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		244,962	624,358
Total cost of revenue		141,165	354,786
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		19,468	55,698
Total cost of revenue		$ 11,159	$ 29,750