Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2023	Jun. 30, 2022	Jun. 30, 2023	Jun. 30, 2022
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net (loss) income from discontinued operations	$ 993	$ (2,555)	$ (1,943)	$ 2,159,597
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue				264,430
Total cost of revenue				152,324
Gross profit				112,106
Research and development				18,486
Selling, general and administrative		480		30,622
Total operating expenses		480		49,108
Operating (loss) income		(480)		62,998
(Loss) gain on divestiture		(990)		2,560,384
(Loss) income before income taxes		(1,470)		2,623,382
Income tax provision		1,085		463,785
Net (loss) income from discontinued operations	$ 1,000	$ (2,555)		2,159,597
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue				244,962
Total cost of revenue				141,165
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue				19,468
Total cost of revenue				$ 11,159