Commitments and Contingencies - Contingencies (Details) - Edwards Vacuum LLC, Indemnification, Definitive Agreement, Third-party Warranty Claim - USD ($) $ in Millions	1 Months Ended
Jan. 31, 2023	Mar. 31, 2023
Loss Contingency, Information about Litigation Matters [Abstract]
Loss contingency, damages sought, value	$ 1.0
Loss Contingency Accrual, Disclosures [Abstract]
Loss contingency accrual		$ 2.5

The value (monetary amount) of the award the plaintiff seeks in the legal matter.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (a)
-URI https://asc.fasb.org/extlink&oid=121557415&loc=d3e14435-108349

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 1
-URI https://asc.fasb.org/extlink&oid=121557415&loc=d3e14326-108349

Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 9
-Subparagraph (a)
-URI https://asc.fasb.org/extlink&oid=121557415&loc=d3e14557-108349

Name:	us-gaap_LossContingencyDamagesSoughtValue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration