Discontinued Operations - Financial Results (Details) $ in Thousands	3 Months Ended
Dec. 31, 2021 USD ($)
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ 40,462
Discontinued Operations, Disposed of by Sale \| Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	203,670
Total cost of revenue	115,906
Gross profit	87,764
Research and development	13,740
Selling, general and administrative	22,676
Total operating expenses	36,416
Operating income	51,348
Other income, net	(46)
Income before income taxes	51,302
Income tax provision	10,840
Net income from discontinued operations	40,462
Discontinued Operations, Disposed of by Sale \| Semiconductor Automation Business \| Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	188,240
Total cost of revenue	107,597
Discontinued Operations, Disposed of by Sale \| Semiconductor Automation Business \| Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	15,430
Total cost of revenue	$ 8,309

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