Discontinued Operations - Non-cash Items and Capital Expenditures (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business - USD ($) $ in Thousands	3 Months Ended	9 Months Ended
Jun. 30, 2021	Jun. 30, 2022	Jun. 30, 2021
Discontinued Operation, Alternative Cash Flow Information [Abstract]
Depreciation and amortization	$ 2,697		$ 6,393
Capital expenditures	903	$ 2,862	3,634
Stock-based compensation	$ 1,742	$ 8,032	$ 7,705

Amount of deprecation and amortization expense attributable to property, plant and equipment and intangible assets of discontinued operations.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 28
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 205
-SubTopic 20
-Section 50
-Paragraph 5B
-Subparagraph (c)(2)
-URI https://asc.fasb.org/extlink&oid=109222650&loc=SL51721673-107760

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration