Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2022	Jun. 30, 2021	Jun. 30, 2022	Jun. 30, 2021
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net (loss) income from discontinued operations	$ (2,555)	$ 41,008	$ 2,159,597	$ 95,414
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		186,262	264,430	474,674
Total cost of revenue		104,293	152,324	267,538
Gross profit		81,969	112,106	207,136
Research and development		12,795	18,486	35,497
Selling, general and administrative	480	18,058	30,622	49,998
Restructuring charges				126
Total operating expenses	480	30,853	49,108	85,621
Operating (loss) income	(480)	51,116	62,998	121,515
Other income, net		26		(1,300)
(Loss) gain on divestiture	(990)		2,560,384
(Loss) income before income taxes	(1,470)	51,142	2,623,382	120,215
Income tax provision	1,085	10,134	463,785	24,801
Net (loss) income from discontinued operations	$ (2,555)	41,008	2,159,597	95,414
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		171,674	244,962	433,964
Total cost of revenue		96,784	141,165	248,288
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue		14,588	19,468	40,710
Total cost of revenue		$ 7,509	$ 11,159	$ 19,250