Discontinued Operations - General Information (Details) $ in Thousands		3 Months Ended		9 Months Ended
	Feb. 01, 2022 USD ($) lease	Jun. 30, 2022 USD ($)	Jun. 30, 2021 USD ($)	Jun. 30, 2022 USD ($)	Jun. 30, 2021 USD ($)
Thomas H. Lee Partners, L.P. - N10K
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Transition service agreement, term, low end of range	3 months
Transition service agreement, term, high end of range	24 months
Sale leaseback transaction, lease agreements, number | lease	2
Sale leaseback transaction, lease term - N10K	24 months
Sale leaseback transaction, termination notice period	90 days
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Proceeds from divestiture	$ 2,900,000
Cash proceeds after adjustments and deducting taxes and other items	2,500,000
(Loss) gain on divestiture		$ (990)		$ 2,560,384
Liability related to retention and stock compensation for former employees of the Company that were conveyed with the transaction	$ 18,100
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Working capital adjustment			$ (1,300)		$ (1,300)