Discontinued Operations - Assets and Liabilities (Details) $ in Thousands	Sep. 30, 2021 USD ($)
Disposal Group, Including Discontinued Operation, Assets, Current [Abstract]
Cash and cash equivalents	$ 45,000
Total current assets of discontinued operation	311,385
Disposal Group, Including Discontinued Operation, Assets, Noncurrent [Abstract]
Total long-term assets of discontinued operation	183,828
Disposal Group, Including Discontinued Operation, Liabilities, Current [Abstract]
Total current liabilities of discontinued operation	128,939
Disposal Group, Including Discontinued Operation, Liabilities, Noncurrent [Abstract]
Total long-term liabilities of discontinued operation	32,444
Discontinued Operations, Held-for-sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Assets, Current [Abstract]
Cash and cash equivalents	45,000
Accounts receivable, net	142,256
Inventories	110,735
Other current assets	13,394
Total current assets of discontinued operation	311,385
Disposal Group, Including Discontinued Operation, Assets, Noncurrent [Abstract]
Property, plant and equipment, net	32,058
Long-term deferred tax assets	3,167
Goodwill	81,477
Intangibles, net	44,468
Other assets	22,658
Total long-term assets of discontinued operation	183,828
Disposal Group, Including Discontinued Operation, Liabilities, Current [Abstract]
Accounts payable	68,074
Deferred revenue	7,141
Accrued warranty and retrofit costs	6,081
Accrued compensation and benefits	18,144
Accrued Income Taxes	11,702
Accrued expenses and other current liabilities	18,014
Total current liabilities of discontinued operation	129,156
Disposal Group, Including Discontinued Operation, Liabilities, Noncurrent [Abstract]
Long-term tax reserves	2,356
Long-term deferred tax liabilities	6,548
Long-term pension liabilities	5,490
Long-term operating lease liabilities	15,425
Other long-term liabilities	2,625
Total long-term liabilities of discontinued operation	$ 32,444