Discontinued Operations - Financial Results (Details) - USD ($) $ in Thousands	3 Months Ended		6 Months Ended
	Mar. 31, 2022	Mar. 31, 2021	Mar. 31, 2022	Mar. 31, 2021
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Net income from discontinued operations	$ 2,121,690	$ 31,084	$ 2,162,152	$ 54,406
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	60,760	157,051	264,430	288,412
Total cost of revenue	36,418	87,677	152,324	163,245
Gross profit	24,342	69,374	112,106	125,167
Research and development	4,746	11,708	18,486	22,702
Selling, general and administrative	7,466	17,841	30,142	31,940
Restructuring charges		(1)		126
Total operating expenses	12,212	29,548	48,628	54,768
Operating income	12,130	39,826	63,478	70,399
Other income, net		(87)		(1,326)
Gain on divestiture	2,561,420		2,561,374
Income before income taxes	2,573,550	39,739	2,624,852	69,073
Income tax provision	451,860	8,655	462,700	14,667
Net income from discontinued operations	2,121,690	31,084	2,162,152	54,406
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Products
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	56,722	144,136	244,962	262,290
Total cost of revenue	33,568	82,727	141,165	151,504
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Services
Disposal Group, Including Discontinued Operation, Income Statement Disclosures [Abstract]
Total revenue	4,038	12,915	19,468	26,122
Total cost of revenue	$ 2,850	$ 4,950	$ 11,159	$ 11,741