Nature of Operation (Details) - Discontinued Operations, Disposed of by Sale - Semiconductor Automation Business $ in Billions	Feb. 01, 2022 USD ($)
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Proceeds from divestiture	$ 2.9
Cash proceeds after adjustments and deducting taxes and other items	$ 2.5

The cash inflow associated with the amount received from the sale of a portion of the company's business, for example a segment, division, branch or other business, during the period.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 12
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=123570139&loc=d3e3179-108585

Name:	us-gaap_ProceedsFromDivestitureOfBusinesses
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration