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Date when the acquirer obtains control of the acquiree, in YYYY-MM-DD format.

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The amount of goodwill arising from a business combination that is expected to be deductible for tax purposes.

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Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer.

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Amount of deferred tax liability attributable to taxable temporary differences assumed at the acquisition date.

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Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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Discontinued Operations - Acquisitions (Details) - USD ($) $ in Thousands	Apr. 29, 2021	Dec. 31, 2021	Sep. 30, 2021
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract]
Goodwill		$ 468,585	$ 469,356
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business \| Precise Automation, Inc.
Business Acquisition, Date of Acquisition [Abstract]
Business acquisition, effective date of acquisition	Apr. 29, 2021
Business Combination, Consideration Transferred [Abstract]
Total purchase price	$ 69,800
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract]
Goodwill	33,100
Deferred tax liabilities	$ 6,200
Weighted average useful life of intangible assets	11 years
Business Combination, Goodwill [Abstract]
Goodwill deductible for tax purposes	$ 0
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business \| Precise Automation, Inc. \| Completed Technology
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract]
Intangible assets	38,700
Discontinued Operations, Held-for-sale \| Semiconductor Automation Business \| Precise Automation, Inc. \| Customer Relationships
Business Combination, Recognized Identifiable Assets Acquired, Goodwill, and Liabilities Assumed, Net [Abstract]
Intangible assets	$ 2,500