Discontinued Operations - General Information (Details) $ in Thousands		3 Months Ended
	Feb. 01, 2022 USD ($) lease	Dec. 31, 2020 USD ($)
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Adjustment to the gain on divestiture, net of tax		$ 948
Thomas H. Lee Partners, L.P. | Subsequent Event
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Transition service agreement, term, low end of range	3 months
Transition service agreement, term, high end of range	24 months
Sale leaseback transaction, lease agreements, number | lease	2
Sale leaseback transaction, lease term	24 months
Sale leaseback transaction, termination notice period	90 days
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Subsequent Event
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Proceeds from divestiture	$ 3,000,000
Discontinued Operations, Disposed of by Sale | Semiconductor Automation Business | Subsequent Event | Forecast
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Cash proceeds after adjustments and deducting taxes and other items	$ 2,400,000
Discontinued Operations, Disposed of by Sale | Semiconductor Cryogenics Business
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Adjustment to the gain on divestiture, net of tax		$ 1,300